Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD
نویسندگان
چکیده
منابع مشابه
Sintering Behavior of Spark Plasma Sintered SiC with Si-SiC Composite Nanoparticles Prepared by Thermal DC Plasma Process
The Si-coated SiC (Si-SiC) composite nanoparticle was prepared by non-transferred arc thermal plasma processing of solid-state synthesized SiC powder and was used as a sintering additive for SiC ceramic formation. Sintered SiC pellet was prepared by spark plasma sintering (SPS) process, and the effect of nano-sized Si-SiC composite particles on the sintering behavior of micron-sized SiC powder ...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 2009
ISSN: 1882-0743,1348-6535
DOI: 10.2109/jcersj2.117.415